LithoProf3D®
GS Key Features

Ultra-fast 3D Lithography equipment for sustainable production for substrate formats up to 4" (6” in customized equipment).

LithoProf3D®-GSII

World’s first modularly built lithography system which satisfies academic needs and industrial requirements. LithoProf3D®-GSII supports component fabrication as well as master fabrication (creation of masters for nano- and micro-replication for series manufacturing). 

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  • Ultra-fast 3D Lithography equipment for sustainable production for substrate formats up to 4".
  • Fits in any standard production line.
  • Prints on substrates of any shape or kind with a large build volume, enabling on-device printing.
  • Exclusive 5-axes design for position-synchronized movements that enable stitching-free processing.
  • Tunable dimensionality of structures from 1D via 2D and 2.5D to real 3D structure fabrication.
  • Ultra-fast fabrication with tunable resolution down to sub-µm.
  • Works with all photoresists, photostructurable glasses.
  • Thin-film metal ablation included: just change the process parameters.
  • Virtual Machine Code Creator with numerous implemented and combinable fabrication strategies.
  • MPO’s software controls the fabrication parameters to adjust resolution throughout the process. It allows to print critical parts in high-resolution, and to gain speed in other parts.
  • Touch screen with user-friendly GUI and remote control.
  • LithoBath3D: Easy to exchange exposure configuration for large-scale structures. Not limited by the working distance of the objective (no manual adjustment required) with automatic switching of laser path (patent exclusively licensed).
  • LithoDILL3D: Exposure mode for objective in physical contact with the photoresist (dip-in 3D lithography) with constant optical conditions throughout the printing (patent exclusively licensed).
  • Chuck: Base with exchangeable plates for different substrate formats and shapes (wafers, glass substrates, …).
  • Vision-to-Align System: Enables automated detection of the target printing positions on the workpiece (position, orientation).